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Product ID: 09
HOLON/ CD-SEM for Wafer & Mask
Holon have developed the optimum solution for charge-up suppression and achieved charge-less CD measurement for all types of masksĄ]WIND-SEM). The system is designed to observe and measure not only EUV mask but Nanoimprint template.
CONTACT
Sales Contact: Vince Hsu
Extn.: 320
E-mail: vincehsu@limchemical.com.tw
Service Contact: Chien Kang Chen
Extn.: 804
E-mail: ckdan@limchemical.com.tw
China
Sales Contact: Jack Lin
Mobile: +86-138-1880-6522
E-mail: jackslin@limtec.com.cn
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