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Process Tools & Unit
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APPRECIA/ Nison 1800(熱磷酸控溫系統) (01)
Stable uniformity and selectivity ratio in SiN etching process. Contact Window-Taiwan- Sales: 吳文誠 TEL: +886-3-5690077 #312 E-mail: eric@limchemical.com.tw-C...
APPRECIA/ PSYRION(磷酸再生系統) (33)
應用於氮化矽蝕刻製程,去除磷酸中之矽化合物,去除率高達85%以上。PSYRION應用不只能降低環境污染,更能減低成本支出。Contact Window-Taiwan- Sales: 吳文誠 TEL: +886-3-5690077 #312 E-mail: eric@limchemical.com.tw-Chin...
IMAI/ 洗淨機 (06)
High performance, Low cost, fast delivery & customer design for FPD Industry. Experienced Panel Size: Min. 1.5 inch, Max: 57 inch. Cleaner + Annealing (IR) is also availabl...
IMAI/ 熱烤爐 (07)
High performance, Low cost, fast delivery & customer design for FPD Industry. Experienced Panel Size: Min. 1.5 inch, Max: 57 inch. Cleaner + Annealing (IR) is also availabl...
ORION/ 溫濕度控制器 (05)
Orion provides various High Accuracy Temp. & Humidity Control Equipment for IC & LCD industry. Contact Window-Taiwan- Sales: 邱文鴻 TEL: +886-3-5690077 #212...
SASAKURA/ 超潔淨電解式臭氧水(氫氣水)產生器 (37)
利用電解去離子水,可在無塵室中提供無NOX的臭氧水/氫氣水。SASAKURA同時可以達成業界最高溫度50C/最高濃度100ppm,可供LTPS/MASK/PHOTORESIST REMOVE 等等先進潔淨製程使用。Contact Window-Taiwan- Sales: 許任勝 TEL: +886-3-5690077 ...
USHIO/ 晶圓週邊曝光機 (03)
It helps to remove photoresist from the wafer periphery. It is also useful for bumping process. Contact Window-Taiwan- Sales: 邱文鴻 TEL: +886-3-5690077 #212 E...
USHIO/ 步進機 (04)
Low Cost & High Performance. Contact Window-Taiwan- Sales: 邱文鴻 TEL: +886-3-5690077 #212 E-mail: frank@limchemical.com.tw-China- Sales: 林松楠 TEL...
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