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ACCEPT AND PROCEED
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Process Tools & Unit

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ORION/ Total Solution of Temperature and Humidity

ORION/ Total Solution of Temperature and Humidity (05)

Orion provides various High Accuracy Temp. & Humidity Control Equipment for IC & LCD industry. Contact Window Sales: Frank Chiu TEL: +886-3-5690077 #212 E-mail: frank@limchemical.com.tw

USHIO/ Wafer Edge Exposure System

USHIO/ Wafer Edge Exposure System (03)

It helps to remove photoresist from the wafer periphery. It is also useful for bumping process. Contact Window Sales: Frank Chiu TEL: +886-3-5690077 #212 E-mail: frank@limchemical.com.tw

USHIO/ UV Curing System Unihard & Charge Eraser

USHIO/ UV Curing System Unihard & Charge Eraser (02)

It helps to ensure formation of line patterns & limits damages to photoresist caused by plasmas generated during dry etching. (6", 8", 12" all available). It also can be the "Charge Eraser". Sales Contact: Frank Chi...

TAZMO/ Nison 1800

TAZMO/ Nison 1800 (01)

Stable uniformity and selectivity ratio in SiN etching process.   Contact Window Sales: Eric Wu TEL: +886-3-5690077 #312 E-mail: eric@limchemical.com.tw

SASAKURA/ OZONE MASTER

SASAKURA/ OZONE MASTER (30)

These systems provide ozonized water that is absolutely free from contamination and NOx by means of the electrolytic ozonizer, purifying it even further and bringing it into contact with ultra-pure water.Especially, the ...

TAZMO/ PSYRION(H3PO4 Reclaim System)

TAZMO/ PSYRION(H3PO4 Reclaim System) (36)

Reclaim system for H3PO4 used in SiN Etching Process,Capable to remove over 85% of SiO2. PSYRION is not only ecological,but also economically effective.

LIM/ Retrofit, Refurbish, Installation for Wet Station

LIM/ Retrofit, Refurbish, Installation for Wet Station (42)

We service for,1. Second-Hand Wet Station- Rotrofit & Refurbish- Relocation & Installation2. New Wet Station- Installation Contact Window -Taiwan- Sales: Boson Liu TEL: +886-3-5690077 #326 E-mail: Liu@limchemical...

ISHIMORI/ O3 DIW GENERATOR

ISHIMORI/ O3 DIW GENERATOR (44)

Low running cost eauipment for clean O3 DIW manufacturing. Contact Window Sales: Eric Wu TEL: +886-3-5690077 #312 E-mail: eric@limchemical.com.tw

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