Model number： STORM3000
VPTek STORM 3000
Reticle defect inspection 設備
Quantity
The STORM 3000 is VPTek’s third-generation IC mask defect inspection product. After years of continuous testing and ongoing refinement, the STORM 3000 has obtained evaluation recognition from leading customers in the industry. Based on advanced laser imaging technology and highly sensitive software algorithms, the STORM 3000 supports DB, DD, and SL inspection modes, making it suitable for the mask production process, outgoing inspection, and periodic inspection needs of mask shops and fabs. Targeting 180/130 nm process nodes, it offers the advantages of high precision, high efficiency, and ease of use.
Key Features
— Ultra high resolution optical system based on UV laser
— Support simultaneous inspection of reflected and transmitted light
— Support DD, SL, and DB inspection modes
— Supports SMIF Pod, Nikon CASE, Canon CASE, Shipping Box and other film boxes
— Supports GDS, OASIS, MEBES file formats
— Supports Binary and PSM masks
— Support OPC calibration
— Support GPU distributed computing
— Support simultaneous inspection of reflected and transmitted light
— Support DD, SL, and DB inspection modes
— Supports SMIF Pod, Nikon CASE, Canon CASE, Shipping Box and other film boxes
— Supports GDS, OASIS, MEBES file formats
— Supports Binary and PSM masks
— Support OPC calibration
— Support GPU distributed computing
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