Model number： IRIS530
VPTek IRIS 530
IC Mask double surface particle inspection設備
Quantity
The IRIS 530 is VPTek’s dual-surface particle inspection system for IC masks. The system employs upper and lower optical assemblies along with both brightfield and darkfield illumination modes. Capable of simultaneously detecting particles and contamination on both the pellicle and glass surfaces, it is suitable for outgoing inspection at mask shops as well as routine monitoring in fab environments.
Key Features
— Simultaneously detect particles on the glass surface and pellicle surface
— Compatible with RSP200 Nikon Case、Opening of Crystal Box and Automatic Upper and Lower Plate
— Inspection method based on bright field and dark field
— Pellicle surface, glass surface, inner and outer inspection areas of membrane frame can be flexibly set
— Visual display of the relationship between defect location and graphic location
— Configure an air bath knife to remove surface particles
— Compatible with RSP200 Nikon Case、Opening of Crystal Box and Automatic Upper and Lower Plate
— Inspection method based on bright field and dark field
— Pellicle surface, glass surface, inner and outer inspection areas of membrane frame can be flexibly set
— Visual display of the relationship between defect location and graphic location
— Configure an air bath knife to remove surface particles
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