TAZMO-Phosphoric Acid Temperature Control & Regeneration System, Single Wafer Cleaner

Product Features

• Achieves optimal boiling control by injecting DIW into the phosphoric acid circulation loop
• Well-established track record in phosphoric acid processes, with over 800 units in operation worldwide

Phosphoric Acid Regeneration System (PSYRION)

• Removes silicon compounds from phosphoric acid, extending its service life
• Reduces operating costs by decreasing consumption of fresh phosphoric acid
• Contributes to carbon neutrality and helps reduce environmental pollution