型号： STORM3000
VPTek STORM 3000
Reticle defect inspection 设备
数量
STORM 3000 是 VPTek 第三代 IC Mask 缺陷检测产品，经过数年不断测试与持续改进，STORM 3000 已取得业界领先客户的评估认可。 STORM 3000 基于先进的雷射成像技术与高灵敏度的软件算法，可具备 DB、DD、SL 等检测模式，适用于 Mask Shop、FAB 对光罩生产过程、出货、及定期检测的需求，针对 180/130nm 制程，具有高精度、高效率及容易使用等优势。
Key Features
— Laser based ultra-high resolution optical system
— Support SMIF Pod automatic loading and unloading
— Support particle, scratch, pinhole, and dirt inspection
— Support automatic review and defect classification
— Support polishing plates, chrome plates, and post adhesive testing
— Support automatic grading and caching of substrates
— Support GPU distributed computing
— Support SMIF Pod automatic loading and unloading
— Support particle, scratch, pinhole, and dirt inspection
— Support automatic review and defect classification
— Support polishing plates, chrome plates, and post adhesive testing
— Support automatic grading and caching of substrates
— Support GPU distributed computing
关闭