型號： STORM3000
VPTek STORM 3000
Reticle defect inspection 設備
數量
STORM 3000是 VPTek 第三代 IC Mask 缺陷檢測產品，經過數年不斷測試與持續改進，STORM 3000 已取得業界領先客戶的評估認可。 STORM 3000 基於先進的雷射成像技術與高靈敏度的軟體演算法，可具備 DB、DD、SL 等檢測模式，適用於 Mask Shop、FAB 對光罩生產過程、出貨、及定期檢測的需求，針對 180/130nm 制程，具有高精度、高效率及容易使用等優勢。
Key Features
— Ultra high resolution optical system based on UV laser
— Support simultaneous inspection of reflected and transmitted light
— Support DD, SL, and DB inspection modes
— Supports SMIF Pod, Nikon CASE, Canon CASE, Shipping Box and other film boxes
— Supports GDS, OASIS, MEBES file formats
— Supports Binary and PSM masks
— Support OPC calibration
— Support GPU distributed computing
— Support simultaneous inspection of reflected and transmitted light
— Support DD, SL, and DB inspection modes
— Supports SMIF Pod, Nikon CASE, Canon CASE, Shipping Box and other film boxes
— Supports GDS, OASIS, MEBES file formats
— Supports Binary and PSM masks
— Support OPC calibration
— Support GPU distributed computing
關閉