型号： STORM3000U
VPTek STORM 3000U
IC Mask substrate defect inspection设备
数量
STORM 3000U 是 VPTek 新一代针对 IC Mask 基板缺陷检测产品，基于已被认可的STORM 3000 平台架构，在光学成像、传输及快取进行相应的优化、以提升易用性及降低设备成本。适用于 Mask Blank 基板生产、出货及 Mask shop 来料检测需求，针对 200nm 检测精度，具有高效率、容易使用及低成本等优势。
Key Features
— Laser based ultra-high resolution optical system
— Support SMIF Pod automatic loading and unloading
— Support particle, scratch, pinhole, and dirt inspection
— Support automatic review and defect classification
— Support polishing plates, chrome plates, and post adhesive testing
— Support automatic grading and caching of substrates
— Support GPU distributed computing
— Support SMIF Pod automatic loading and unloading
— Support particle, scratch, pinhole, and dirt inspection
— Support automatic review and defect classification
— Support polishing plates, chrome plates, and post adhesive testing
— Support automatic grading and caching of substrates
— Support GPU distributed computing
关闭