型號： STORM3000U
VPTek STORM 3000U
IC Mask substrate defect inspection設備
數量
STORM 3000U 是 VPTek 新一代針對 IC Mask 基板缺陷檢測產品，基於已被認可的STORM 3000 平台架構，在光學成像、傳輸及快取進行相應的最佳化、以提升易用性及降低設備成本。適用於 Mask Blank 基板生產、出貨及 Mask shop 來料檢測需求，針對 200nm 檢測精度，具有高效率、容易使用及低成本等優勢。
Key Features
— Laser based ultra-high resolution optical system
— Support SMIF Pod automatic loading and unloading
— Support particle, scratch, pinhole, and dirt inspection
— Support automatic review and defect classification
— Support polishing plates, chrome plates, and post adhesive testing
— Support automatic grading and caching of substrates
— Support GPU distributed computing
— Support SMIF Pod automatic loading and unloading
— Support particle, scratch, pinhole, and dirt inspection
— Support automatic review and defect classification
— Support polishing plates, chrome plates, and post adhesive testing
— Support automatic grading and caching of substrates
— Support GPU distributed computing
關閉