型号： IRIS530
VPTek IRIS 530
IC Mask double surface particle inspection设备
数量
IRIS 530 是 VPTek 针对 IC Mask 所推出的双表面颗粒检测设备，系统采用上下两组光学系统与明场、暗场照明模式。可同时侦测 Pellicle 及 Glass 面的颗粒及脏污侦测，适用于 Mask shop 出货侦测、FAB 厂日常监控。
Key Features
— Simultaneously detect particles on the glass surface and pellicle surface
— Compatible with RSP200 Nikon Case、Opening of Crystal Box and Automatic Upper and Lower Plate
— Inspection method based on bright field and dark field
— Pellicle surface, glass surface, inner and outer inspection areas of membrane frame can be flexibly set
— Visual display of the relationship between defect location and graphic location
— Configure an air bath knife to remove surface particles
— Compatible with RSP200 Nikon Case、Opening of Crystal Box and Automatic Upper and Lower Plate
— Inspection method based on bright field and dark field
— Pellicle surface, glass surface, inner and outer inspection areas of membrane frame can be flexibly set
— Visual display of the relationship between defect location and graphic location
— Configure an air bath knife to remove surface particles
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