型號： IRIS530
VPTek IRIS 530
IC Mask double surface particle inspection設備
數量
IRIS 530 是 VPTek 針對 IC Mask 所推出的雙表面顆粒檢測設備，系統採用上下兩組光學系統與明場、暗場照明模式。可同時偵測 Pellicle 及 Glass 面的顆粒及髒污偵測，適用於 Mask shop 出貨偵測、FAB 廠日常監控。
Key Features
— Simultaneously detect particles on the glass surface and pellicle surface
— Compatible with RSP200 Nikon Case、Opening of Crystal Box and Automatic Upper and Lower Plate
— Inspection method based on bright field and dark field
— Pellicle surface, glass surface, inner and outer inspection areas of membrane frame can be flexibly set
— Visual display of the relationship between defect location and graphic location
— Configure an air bath knife to remove surface particles
— Compatible with RSP200 Nikon Case、Opening of Crystal Box and Automatic Upper and Lower Plate
— Inspection method based on bright field and dark field
— Pellicle surface, glass surface, inner and outer inspection areas of membrane frame can be flexibly set
— Visual display of the relationship between defect location and graphic location
— Configure an air bath knife to remove surface particles
關閉