VPTek Tornado 3000

Tornado 3000 是 VPTek 推出针对 8、12 吋次微米级精度的晶圆全自动光学检测设备，基于 Tornado 2000 的成熟架构，透过对光学系统的进一步升级优化，不断提升光学系统影像分辨率，以适应更为苛刻的制程要求。

针对 8、12 吋晶圆前段、中段、及先进封装过程中的 2D、3D 缺陷检测

    Supports feeding methods such as 8-inch SMIF, 12 inch FOUP, and Open Cassette
    Dual light path array + area array imaging system, fast scanning
    UV based optical system can better capture subtle defects
    Support hardware, software, and fitting multiple automatic focusing modes to ensure the inspection accuracy of large warped wafers
    Support partition inspection with multiple ROIs and layers
    Support D2D, D2G, D2DB inspection algorithms
    Support AI defect inspection and classification
    Support data integration with customer MES systems