VPTek Tornado 2100
VPTek Tornado 2100

    Model number： Tornado2100

    VPTek Tornado 2100

    Wafer CD / OVL measurement設備

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    The Tornado 2100 is VPTek’s fully automated optical CD and overlay measurement system for wafers. Built on a high-resolution optical imaging platform, it further enhances pattern contrast and reduces transitional pixels. Paired with a high-performance motion stage, it improves positioning efficiency during measurement, reduces steady-state jitter, and meets stringent requirements for measurement repeatability.

    Application Scenarios

    CD and overlay precision measurement for 4-, 6-, and 8-inch wafers in front-end processes

    Key Features

    • Compatible with 4, 6, and 8-inch wafers simultaneously, flexible and convenient
    • Support automatic measurement based on Recipe
    • Support multiple wavelength lighting and optical systems including white light, RGB, and UV
    • Support multiple line width measurement methods such as grayscale threshold, grayscale change rate, and line fitting
    • Multi hold non-linear compensation function
    • Support line width measurement under low contrast conditions
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