型番： Tornado2100
VPTek Tornado 2100
Wafer CD / OVL measurement設備
数量
Tornado 2100 是 VPTek 推出的晶圓全自動光學 CD 及 OVERLAY 測量設備，以高解析度的光學影像系統為基礎，進一步提升圖形對比度並減少了過渡像素。搭配高效能移動平台，提高了量測過程中定位的效率，減少了穩態抖動，並滿足了量測重複性的嚴格要求。
Application Scenarios
針對4、6、8吋晶圓前段製程中的 CD 及 OVERLAY 精度的測量
Key Features
- Compatible with 4, 6, and 8-inch wafers simultaneously, flexible and convenient
- Support automatic measurement based on Recipe
- Support multiple wavelength lighting and optical systems including white light, RGB, and UV
- Support multiple line width measurement methods such as grayscale threshold, grayscale change rate, and line fitting
- Multi hold non-linear compensation function
- Support line width measurement under low contrast conditions
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