型号： Tornado2100
VPTek Tornado 2100
Wafer CD / OVL measurement设备
数量
Tornado 2100 是 VPTek 推出的晶圆全自动光学 CD 及 OVERLAY 测量设备，以高分辨率的光学影像系统为基础，进一步提升图形对比度并减少了过渡像素。搭配高效能移动平台，提高了量测过程中定位的效率，减少了稳态抖动，并满足了量测重复性的严格要求。
Application Scenarios
针对4、6、8吋晶圆前段制程中的 CD 及 OVERLAY 精度的测量
Key Features
- Compatible with 4, 6, and 8-inch wafers simultaneously, flexible and convenient
- Support automatic measurement based on Recipe
- Support multiple wavelength lighting and optical systems including white light, RGB, and UV
- Support multiple line width measurement methods such as grayscale threshold, grayscale change rate, and line fitting
- Multi hold non-linear compensation function
- Support line width measurement under low contrast conditions
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