Model number： STORM3000U
VPTek STORM 3000U
IC Mask substrate defect inspection設備
Quantity
The STORM 3000U is VPTek’s next-generation IC mask substrate defect inspection product. Built on the proven STORM 3000 platform architecture, it incorporates targeted optimizations in optical imaging, data transmission, and caching to improve ease of use and reduce equipment costs. Designed for mask blank substrate production, outgoing inspection, and incoming inspection at mask shops, the STORM 3000U targets 200 nm inspection precision and offers the advantages of high efficiency, ease of use, and low cost.
Key Features
— Laser based ultra-high resolution optical system
— Support SMIF Pod automatic loading and unloading
— Support particle, scratch, pinhole, and dirt inspection
— Support automatic review and defect classification
— Support polishing plates, chrome plates, and post adhesive testing
— Support automatic grading and caching of substrates
— Support GPU distributed computing
— Support SMIF Pod automatic loading and unloading
— Support particle, scratch, pinhole, and dirt inspection
— Support automatic review and defect classification
— Support polishing plates, chrome plates, and post adhesive testing
— Support automatic grading and caching of substrates
— Support GPU distributed computing
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